RIE05- ELECTRICAL STATIC CHUCK BASED DEEP REACTIVE ION ETCHING SYSTEM WITH 4 YEAR SERVICE AGREEMENT.
$1,713,660
| Recipient | KLA CORPORATION UEI MDYMRNJZ36U3 |
|---|---|
| Award ID | 1333ND23PNB680281 |
| Award amount | $1,713,660 |
| Award type | PURCHASE ORDER |
| Awarding agency | Department of Commerce — National Institute of Standards and Technology |
| NAICS | 333242 — SEMICONDUCTOR MACHINERY MANUFACTURING |
| PSC | 6640 |
| Set-aside | Unrestricted |
| Start date | Sep 20, 2023 |
| End date | Feb 26, 2025 |
| Place of performance | — |
| Record updated | Sep 22, 2023 |
View the official award record
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