TO PROCURE THE INDUCTIVELY COUPLED PLASMA (ICP) DEEP REACTIVE ION ETCHING (DRIE) TOOL TO INCLUDE ALL OF THE REQUIRED SPECIFICATIONS FOUND IN ATTACHMENT 1.
$687,896
| Recipient | OXFORD INSTRUMENTS AMERICA, INC. UEI QK66A86PKE67 |
|---|---|
| Award ID | N0017325P0063 |
| Award amount | $687,896 |
| Award type | PURCHASE ORDER |
| Awarding agency | Department of Defense — Department of the Navy |
| NAICS | 333242 — SEMICONDUCTOR MACHINERY MANUFACTURING |
| PSC | 3670 |
| Start date | Sep 25, 2025 |
| End date | Jul 1, 2026 |
| Place of performance | CONCORD, MA |
| Record updated | Sep 25, 2025 |
View the official award record
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