INDUCTIVELY COUPLED PLASMA (ICP) REACTIVE ION ETCHING (RIE) TOOL

PURCHASE ORDER won by OXFORD INSTRUMENTS AMERICA, INC. · work in WOBURN, MA
$527,617
RecipientOXFORD INSTRUMENTS AMERICA, INC. UEI QK66A86PKE67
Award IDN0017320P2031
Award amount$527,617
Award typePURCHASE ORDER
Awarding agencyDepartment of Defense — Defense Contract Management Agency
NAICS333242 — SEMICONDUCTOR MACHINERY MANUFACTURING
PSC3670
Start dateSep 30, 2020
End dateJan 25, 2024
Place of performanceWOBURN, MA
Record updatedMar 1, 2024

View the official award record

More awards won by OXFORD INSTRUMENTS AMERICA, INC.

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CONFOCAL MICROSCOPE AND SPECTROSCOPY SYSTEM
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Department of Defense · $1,139,566 · Jun 30, 2022
PURCHASE OF A PLAMA PRO 100 PECVD SYSTEM
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