ELIMINATING HIGH-SPATIAL-FREQUENCY TOPOGRAPHY DUE TO PRINT-THROUGH IN MEMS DEFORMABLE MIRRORS
$709,765
| Recipient | BOSTON MICROMACHINES CORPORATION UEI SM8TM1GMFMY9 |
|---|---|
| Award ID | 80NSSC20C0165 |
| Award amount | $709,765 |
| Award type | DEFINITIVE CONTRACT |
| Awarding agency | National Aeronautics and Space Administration — National Aeronautics and Space Administration |
| NAICS | 541715 — RESEARCH AND DEVELOPMENT IN THE PHYSICAL, ENGINEERING, AND LIFE SCIENCES (EXCEPT NANOTECHNOLOGY AND BIOTECHNOLOGY) |
| PSC | AR11 |
| Set-aside | Small business |
| Start date | Jun 26, 2020 |
| End date | Dec 23, 2022 |
| Place of performance | CAMBRIDGE, MA |
| Record updated | Nov 20, 2025 |
View the official award record
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